Quartz is a mineral composed of silicon dioxide, with the chemical formula SiO2. Pure quartz is colorless and transparent, but can appear in various colors due to trace amounts of pigment ions, finely dispersed inclusions, or the presence of color centers, which reduces its transparency. It has a vitreous luster and a greasy sheen on the fracture. Quartz products are widely used in semiconductor manufacturing, and high-purity quartz products are important consumables in wafer production.
The manufacturing process for quartz products is very complex. Quartz sand is first melted and smelted into quartz ingots, which are then heat-formed and cold-processed into quartz products. Based on the process and processing technology, quartz products can be divided into two types: fire-processed and machine-processed. Fire-processing is primarily used in the photovoltaic industry and has lower profit margins. Machine processing relies on different methods and combinations to complete shaping and polishing, primarily producing high-value-added products that require high consistency and stability, and is often used in the semiconductor industry.
Quartz components used in semiconductors can generally be divided into high-temperature and low-temperature components, respectively used in high-temperature processes such as diffusion and oxidation, and low-temperature processes such as etching, packaging, photolithography, and cleaning. Quartz components used in high-temperature processes, as they must operate continuously for hours at temperatures exceeding 1,000 degrees Celsius, require high-temperature resistance, excellent thermal stability, and resistance to deformation. The presence of hydroxyl groups alters the bonding structure of silicon dioxide, the primary component of quartz products, thereby reducing the material's thermal stability and significantly diminishing its high-temperature resistance. Therefore, quartz components used in high-temperature processes require dehydroxylation. Furthermore, these components must exhibit corrosion resistance, excellent light transmittance, and low impurity content. Quartz components used in low-temperature processes, on the other hand, do not require high-temperature processing, so the hydroxyl content of the quartz material is not a requirement.
Quartz Boat
Quartz Tube
Quartz Crucible
Quartz Tank/Bath
Quartz Pedestal
Quartz Bell Jar
Quartz Ring
Other Quartz Parts
Semicorex Quartz Wafer Boat Bracket은 반도체 웨이퍼 및 광전지 생산에 없어서는 안될 구성 요소로 탁월한 재료 특성과 설계 기능을 제공하고 웨이퍼 안정성을 보장하며 공정 결과를 향상시킵니다.
더 읽어보기문의 보내기극한의 조건에서 비교할 수 없는 성능을 제공하도록 설계된 Semicorex 고순도 석영 벨자는 뛰어난 재료 특성을 결합하여 반도체 제조의 엄격한 요구 사항을 충족합니다.**
더 읽어보기문의 보내기Fused Quartz Pedestal은 ALD(원자층 증착), LPCVD(저압 화학 기상 증착) 및 확산 공정에 사용하도록 특별히 설계되어 웨이퍼 표면에 박막을 균일하게 증착합니다.**
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